Structured illumination of a sample

ABSTRACT

A system includes: a light source; first and second gratings; and at least one reflective component that in a first position forms a first light path originating at the light source and extending to the first grating and thereafter to a subsequent component in the system, and that in a second position forms a second light path originating at the light source and extending to the second grating and thereafter to the subsequent component.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of, and claims priority to, U.S.application Ser. No. 16/573,449, filed Sep. 17, 2019, which is anon-provisional application of, and claims the benefit of the filingdate of, U.S. provisional application 62/733,330, filed Sep. 19, 2018,the contents of both of which are incorporated herein by reference.

This application claims priority to Netherlands patent applicationN2022286, filed Dec. 21, 2018, the contents of which are incorporatedherein by reference.

BACKGROUND

Structured illumination microscopy (SIM) has been used to increase theresolution of images obtained from a sample. SIM utilizes several imagesof a sample with differing fringe patterns so that different locationson the sample are exposed to a range of illumination intensities. Insome instances, the procedure can be repeated by rotating the patternorientation about the optical axis at separate angles. The capturedimages may be assembled into a single image having an extended spatialfrequency bandwidth, which may be retransformed into real space togenerate an image having a higher resolution than one captured by aconventional microscope. Existing approaches to SIM may have one or morecharacteristics that increase the complexity, size, manufacturing cost,and/or the cost of operation of the system.

SUMMARY

In a first aspect, a system includes: a light source; first and secondgratings; and at least one reflective component that in a first positionforms a first light path originating at the light source and extendingto the first grating and thereafter to a subsequent component in thesystem, and that in a second position forms a second light pathoriginating at the light source and extending to the second grating andthereafter to the subsequent component.

Implementations can include any or all of the following features. Thereflective component includes a rotatable mirror that assumes the firstor second positions. The rotatable mirror is double-sided and comprisesan elongate member, and wherein an axle is coupled to the elongatemember substantially at a center of the elongate member. The axle isoffset from and substantially parallel to a plane defined by the firstand second light paths. When the rotatable mirror assumes the firstposition, a first end of the elongate member interrupts a first pathoriginating at the light source and extending to the second grating, andreflects first light originating at the light source toward the firstgrating. When the rotatable mirror assumes the first position, a secondend of the elongate member does not interrupt a second path from thefirst grating to the subsequent component. When the rotatable mirrorassumes the second position, a second end of the elongate memberinterrupts a second path from the second grating, and reflects secondlight from the second grating toward the subsequent component. When therotatable mirror assumes the second position, the first end of theelongate member does not interrupt the first path originating at thelight source and extending to the second grating. The first and secondgratings are oriented so that respective normals thereof aresubstantially antiparallel to each other, and wherein the axle issubstantially aligned with the normals. The rotatable mirrorreciprocates between the first and second positions. The reflectivecomponent includes a first translatable mirror that undergoes firsttranslation into the first position. The reflective component furtherincludes a second translatable mirror that undergoes second translationinto the second position. The first and second translations aresubstantially perpendicular to a plane defined by the first and secondlight paths. The first translation is substantially parallel to a planedefined by the first and second light paths. The first translatablemirror undergoes a second translation into the second position, andwherein the second translation is substantially parallel to the planedefined by the first and second light paths. The reflective componentincludes a rotatable prism that assumes the first or second positions.The first and second gratings are positioned adjacent each other,wherein the rotatable prism in the first position reflects first lightalong the first light path toward the first grating, and wherein therotatable prism in the second position reflects second light along thesecond light path toward the second grating. The first and secondgratings face toward the subsequent component. The first and secondgratings are in a fixed position relative to the light source. Thesubsequent component is a phase selector. The system further comprises aphase selector positioned between the light source and the reflectivecomponent. The phase selector is in a fixed position relative to thelight source.

In a second aspect, a system includes: a light source; first and secondgratings; and at least one mirror having a first position thatinterrupts a first path originating at the light source and extending tothe second grating, and directs first light toward the first grating,while not interrupting a second path from the first grating to asubsequent component in the system, and having a second position thatinterrupts a third path from the second grating and directs second lightfrom the second grating toward the subsequent component, while notinterrupting the first path.

Implementations can include any or all of the following features.Respective grating orientations of the first and second gratings aresubstantially perpendicular to each other. The first and second gratingsface toward each other. The subsequent component is a phase selector.The system further comprises a phase selector positioned between thelight source and the at least one mirror.

In a third aspect, a method includes: positioning at least onereflective component to define a first light path originating at a lightsource and extending to a first grating and thereafter to a subsequentcomponent; directing first phase-selected light from the first lightpath onto a sample; positioning the at least one reflective component todefine a second light path originating at the light source and extendingto a second grating and thereafter to the subsequent component; anddirecting second phase-selected light from the second light path ontothe sample.

Implementations can include any or all of the following features.Positioning the at least one reflective component to define the firstlight path comprises interrupting a first path originating at the lightsource and extending to the second grating and directing first lighttoward the first grating, while not interrupting a second path from thefirst grating to the subsequent component. Positioning the at least onereflective component to define the second light path comprisesinterrupting a third path from the second grating and directing secondlight from the second grating toward the subsequent component, while notinterrupting the first path.

It should be appreciated that all combinations of the foregoing conceptsand additional concepts discussed in greater detail below (provided suchconcepts are not mutually inconsistent) are contemplated as being partof the inventive subject matter disclosed herein. In particular, allcombinations of claimed subject matter appearing at the end of thisdisclosure are contemplated as being part of the inventive subjectmatter disclosed herein.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic view of an example system that can facilitatestructured illumination microscopy (SIM) and in which a phase selectoris placed after a reflective component.

FIG. 2 shows an example of a rotating inline grating system (RIGS)having a rotatable mirror that may be implemented as part of the systemof FIG. 1.

FIG. 3A is a top view of the system of FIG. 2 showing the rotatablemirror in a first position.

FIG. 3B is a perspective detailed view of the rotatable mirror in thefirst position shown in FIG. 3A.

FIG. 4A is a top view of the system of FIG. 2 showing the rotatablemirror in a second position.

FIG. 4B is a perspective detailed view of the rotatable mirror in thesecond position shown in FIG. 4A.

FIG. 5 is a schematic view of a system having one or more mirrors thatmay be implemented as part of the system of FIG. 1 to facilitate SIM.

FIG. 6 is a schematic view of an example system having a translatablemirror that may be implemented as part of the system of FIG. 1.

FIGS. 7A-B schematically show an example of vertically translatingmirrors that may be implemented as part of the system in FIG. 6.

FIGS. 8A-B schematically show an example of horizontally translatingmirrors that may be implemented as part of the system in FIG. 6.

FIG. 9 is a schematic view of a system having a rotatable prism that maybe implemented as part of the system of FIG. 1.

FIG. 10 shows an example of a method that can be used for positioningone or more reflective components for performing SIM.

FIG. 11 is a schematic view of an example system that can facilitate SIMand in which a phase selector is placed before a reflective component.

FIG. 12 is a schematic view of an example system that can be used forbiological and/or chemical analysis; the system of FIG. 1 can be a partof the system in FIG. 12.

FIG. 13 shows an example of a system.

DETAILED DESCRIPTION

This document describes examples of systems and techniques that canprovide structured illumination, including, but not limited to, byfacilitating structured illumination microscopy (SIM). Suchsystems/techniques can provide one or more advantages over existingapproaches, for example as will be described below.

Imaging (e.g., using SIM) can be performed to analyze a sample of any ofmultiple materials. In some implementations, SIM imaging or another typeof imaging can be performed as part of biological or chemical analysis,such as a process of sequencing genetic material. In one example, theprocess can be a DNA sequencing process, e.g., sequencing-by-synthesisor next-generation sequencing (also known as high-throughputsequencing). In another example, the process may be used to enablegenotyping. As one skilled in the art will know, genotyping involvesdetermining differences in the genetic make-up (genotype) of anindividual by examining the individual's DNA sequence using biologicalassays and comparing it to another individual's sequence or a referencesequence. Such processes can involve fluorescent imaging, where a sampleof genetic material is subjected to light (e.g., a laser beam) totrigger a fluorescent response by one or more markers on the geneticmaterial. Some nucleotides can have fluorescent tags associated with thenucleotide to fluoresce responsive to exposure to the energy source. Awavelength of the fluorescent response can be used to determine thepresence of a corresponding nucleotide. Fluorescent responses can bedetected over the course of the sequencing process and used to build arecord of nucleotides in the sample.

SIM imaging is based on spatially structured light. For example, thestructure can consist of or include a pattern in the illuminating lightthat helps increase the resolution of the obtained image(s). In someimplementations, the structure can include patterns of fringes. Fringesof light can be generated by impinging a light beam on a diffractiongrating (referred to as a grating for simplicity) such that reflectiveor transmissive diffraction occurs. The structured light can be impingedon the sample, illuminating the sample according to the respectivefringes which may occur according to some periodicity. For example,images of the sample can be acquired at different phases of the fringesin the structured light, sometimes referred to as the respective patternphases of the images. This can allow various locations on the sample tobe exposed to a multitude of illumination intensities. The pattern ofthe structured light can be rotated relative to the sample, and theimages just mentioned can be captured for each of the rotation angles.

Different types of gratings can be used in various implementations. Thegrating(s) can include one or more forms of periodic structure. In someimplementations, the gratings can be formed by removing or omittingphysical material from a substrate. In other implementations, opticalfilters or other non-physical materials may be implemented to form thegratings. For example, the substrate can be provided with a set of slitsand/or grooves therein to form the grating. In some implementations, thegrating can be formed by adding material to the substrate. For example,periodically spaced structures can be formed on the substrate by thesame or a different material.

With a SIM system, it can be preferable that the system is capable ofrapidly processing samples so as to facilitate a high throughput. FasterSIM imaging can enable a greater throughput of the analysis system. Thatis, more chemical or biological samples can be imaged over the same timeperiod. For high throughput, the system may illuminate a relativelylarge area of the sample with high-contrast fringes and/or rapidlyswitch between fringe orientations. For such a system to achieve a highthroughput, the imaging should therefore be highly repeatable andreliable. High optical power may be useful to keep exposure timesrelatively short. As such, good optical efficiency and a powerful lightsource may be useful to achieve a high optical power.

In some SIM systems that project high-contrast fringes, a coherent lightsource may be used. In such systems, a single-mode laser may be such acoherent light source, but may be cost prohibitive in the context of thetype of analysis being done and/or the amount of power required. Othertypes of light sources such as a light-emitting diode (LED) or an arclamp may not provide sufficient coherence for the application. Thus, amultimode laser can be a viable candidate as a coherent light source butis associated with the characteristic of having spectral multimodepatterns. To achieve a desired uniformity with a multimode laser, themultimode laser output can be mode-scrambled. However, use ofmode-scrambled multimode lasers can result in multiple light sources toselectively excite multiple gratings unless an optical switch is used,which may increase cost and optical system complexity. In addition, useof mode-scrambled multimode lasers may also result in reliance on arelay lens system to obtain zero-order blocking for a desired fringefrequency and modulation contrast.

Described herein are implementations of structured illumination systemsfor analyzing samples, some such systems including a single lightsource, at least two fixed gratings, and a mechanism for directing theentire beam from the light source onto one or the other of the gratings.A phase selector can be used for choosing the pattern phase. Themechanism can include either of a rotary double-sided mirror,non-rotating mirrors, or a rotatable prism mirror, to name a fewexamples. With a rotary double-sided mirror, a blade of the mirror canbe placed in a first position for reflection only onto the firstgrating, and can be placed in a second position for reflection only ontothe second grating. A non-rotating mirror can translate into the firstor second positions. A rotatable prism mirror can selectively directlight from the light source onto the first or second grating.

The examples described herein can provide advantages compared toprevious approaches. In some implementations, a rotatable mirror can beused to switch between excitation of the respective gratings. Such arotatable mirror can switch between two optical paths using a singlelight source. In addition, such a rotatable mirror can be sized suchthat errors in rotational position and/or thermal effects do notappreciably alter the optical paths. Reduction of the effect of suchrotational variations and/or thermal effects on the optical paths canallow the SIM imaging system to operate faster as the component movingthe rotatable mirror (e.g., a motor) can operate faster as there is lessreliance on fine tuning of the positioning compared to systems thatimplement moveable gratings or other components. If more than twooptical paths are to be implemented, multiple rotatable mirrors can beimplemented for a multiple optical paths. In some implementations, thegratings may be fixed in place rather than gratings that rotate,translate, or otherwise move as part of operation. This can provideangle precision and stability, to name just two examples, as thegratings also do not require fine positional tuning. In someimplementations, a single light source may be used as the rotatablemirror can be rotated into or out of a respective light path to block orunblock a corresponding light path from the single light source. Byimplementing the selectively positionable reflective component with theoptical subsystem of a SIM system, mode-blocking may be omitted for themultimode laser and the entire path of light may be either transmittedor blocked. Such a system can also eliminate having the orders of lightemitted from a grating be separable from each other at some particularstage of the system (e.g., to require the orders of light to be in focusat some stage where one or more orders are blocked, and one or moreorders are allowed to propagate). That is, a grating can emit light thatis not diffracted and that is referred to as light of order 0, and alsoemit diffracted light that propagates on opposite sides of the 0-orderlight and is referred to as light of orders +/−1, respectively. In asystem that uses order-blocking, the orders 0 and +/−1 of light can allbe in focus at a blocking stage where, say, the 0-order light is blockedand the orders +/−1 are not blocked. In systems that do not useorder-blocking, some or all of the orders of light can come into focuselsewhere in the system (e.g., at an objective lens), and such a systemcan have a shorter optical path length. In addition, such a system witha selectively positionable reflective component may omit an opticalswitch, thereby reducing the components and complexity of the opticalsystem. Moreover, such a system can increase the overall compactness;for example, by omitting a relay lens system that facilitatesrecombining multiple grating paths.

FIG. 1 schematically shows an example of a system 100 that canfacilitate SIM imaging. The system 100 can be used in combination withone or more other examples described herein. Some components in this andother examples are shown conceptually as a block or other genericcomponent; such component(s) can be implemented in form of one or moreseparate or integrated components so as to perform the indicatedfunction(s).

The system 100 includes a light source 102. The light source 102 can beselected based on the coherence and/or power output for which the system100 is to be implemented. For example, a multimode laser can be used asthe light source 102.

The system 100 includes a light-structuring component 104 that receiveslight from the light source 102. In some implementations, thelight-structuring component 104 facilitates that the received lightimpinges on one or more gratings so as to generate a pattern of lightfringes. For example, one or more reflective components can be used fordirecting the light onto the proper grating and/or to further guide thelight toward a next stage in the system 100. Examples of thelight-structuring component 104 are described below. A beam 106extending between the light source 102 and the light-structuringcomponent 104 schematically illustrates the propagation of light. Thelight-structuring component 104 can generate structured light andprovide the structured light to a subsequent component in the system100.

In some implementations, the subsequent component is a phase selector108 in the system 100. The phase selector 108 can receive light from thelight-structuring component 104. In some implementations, the phaseselector 108 is used for selecting the pattern phase at which an imagewill be captured. For example, the phase selector 108 can facilitateselecting among multiple candidate pattern phases according to a desiredillumination of the sample or to a required degree of resolution, asdescribed in greater detail herein.

The system 100 includes a projection lens 110 that can receive lightfrom the phase selector 108. Such light can be referred to asphase-selected light to indicate that the light corresponds to aselection of the particular pattern phase(s) having been done, such asby way of the phase selector 108. The projection lens 110 can includeone or more optical elements such as lenses that condition thephase-selected light before it impinges on a next stage in the system100.

The system 100 includes a mirror 112 that at least partially reflectslight from the projection lens 110 toward an objective lens 114. In someimplementations, the mirror 112 provides selective transmission, such asto reflect some part(s) of illuminating light arriving from theprojection lens 110 and to transmit at least some part of imaging lightarriving at the mirror 112 from the objective lens 114. For example, themirror 112 can be a dichroic mirror.

The objective lens 114 receives illumination light from the mirror 112.The objective lens 114 can include one or more optical elements such aslenses that condition light from the projection lens 110 (as reflectedby the mirror 112) before light impinges on a next stage in the system100.

The objective lens 114 directs light onto a sample 116. In someimplementations, the sample 116 includes one or more materials to beanalyzed. For example, the sample 116 can include genetic material to beilluminated for detection of fluorescent responses. The sample 116 canbe held on a suitable substrate, including, but not limited to, aflowcell that allows liquids or other fluids to selectively be flowedrelative to the sample. For example, the sample 116 can be subjected toreagent containing one or more nucleotides prior to illumination andthereafter image capturing and analysis.

The sample 116 can be held by a stage 118 in the system 100. The stage118 can provide one or more types of manipulation relative to the sample116. In some implementations, physical movement of the sample 116 can beprovided. For example, the stage 118 can translationally and/orrotationally reposition the sample 116 relative to at least one othercomponent of the system 100. In some implementations, thermal treatmentof the sample 116 can be provided. For example, the stage 118 can heatand/or cool the sample 116.

Phase selection can be facilitated by the stage 118. In someimplementations, the stage 118 can translate the sample 116 a distancerelative to stationary light fringes to accomplish phase selection(e.g., using a piezo actuator in the stage 118). For example, the phaseselector 108 can then be bypassed in, or eliminated from, the system100.

That is, light originating in the light source 102, conditioned in thedescribed components, can be directed at the sample 116 for illuminationafter propagating through the objective lens 114. Any light emitted bythe sample 116 can traverse the objective lens 114 in an oppositedirection and partially or entirely be transmitted through the mirror112. The system 100 can include a filter component 120 receiving lightfrom the objective lens 114 through the mirror 112. The filter component120 can filter such light in one or more ways. For example, the filtercomponent 120 can pass through some particular wavelength(s) and/orblock (or reflect) some other particular wavelength(s). In someimplementations, the mirror 112 can incorporate the filter component 120as part of the mirror, such as by positioning the filter component 120on a rear surface of the mirror 112.

Light traversing the filter component 120 can enter a camera system 122in the system 100. The camera system 122 can include one or more imagesensors capable of detecting electromagnetic radiation of the kind(s)relevant to the analysis to be performed. In some implementations, thecamera system 122 is configured for capturing images using fluorescentlight. For example, the camera system 122 can include a charge-coupleddevice, a complementary metal-oxide semiconductor device, or other imagecapture device. The camera system 122 can generate output in digitaland/or analog form. For example, data corresponding to an image capturedby the camera system 122 can be stored by the camera system 122 or canbe sent to a separate component (e.g., a computer system or otherdevice) for storage and/or analysis.

Operation of the system 100 or other apparatuses or machines will beexemplified below. In some implementations, the light-structuringcomponent 104 includes one or more reflective components and at leastone grating. For example, the reflective component can redirect lighttoward, or arriving from, the grating(s) to generate light that isconditioned so as to provide one or more forms of illumination of thesample 116. In some implementations, the light-structuring component 104can condition the light from the light source 102 to perform SIMimaging. For example, such structured light may not need to be in focusat a particular position within the light-structuring component 104;rather, the structured light (e.g., fringes of a diffraction pattern)can be focused at another stage of the system 100, including, but notlimited to, at a back of the objective lens 114.

FIG. 2 shows an example of a system 200 having a rotatable mirror 202.The system 200 can be used in combination with one or more otherexamples described herein. An individual component of the system 200 canperform a similar or identical function to a corresponding componentdescribed with reference to another example in this description.

The system 200 includes a light source 204. In some implementations, thelight source 204 provides light that it in turn receives through atleast one fiber optic cable 206. For example, the light source 204 andthe fiber optic cable 206 can collectively be considered a fiber launchmodule.

The system 200 includes a grating 208 and a grating 210. In someimplementations, the grating 208 and/or 210 can serve as a diffractivecomponent with regard to light from the light source 204. For example,the grating 208 and/or 210 can comprise a substrate with a periodicstructure, the substrate combined with a prism. The gratings 208 and 210can be positioned relative to each other according to one or morearrangements. Here, the gratings 208 and 210 face each other in thesystem 200. The gratings 208 and 210 can be substantially identical toeach other or can have one or more differences. The size, periodicity orother spatial aspect of one of the gratings 208 and 210 can differ fromthat/those of the other. The grating orientation (i.e., the spatialorientation of the periodic structure) of one of the gratings 208 and210 can differ from that/those of the other. In some implementations,the respective grating orientations of the gratings 208 and 210, whichgratings themselves face toward each other, can be substantiallyperpendicular to each other or at any other angle relative to eachother. In some implementations, the gratings 208 and 210 can be atoffset positions relative to the rotatable mirror 202. In someimplementations, the gratings 208 and/or 210 can be in a fixed positionrelative to the light source 204.

The system 200 can include one or more components (e.g., as a phaseselector 108 of FIG. 1) to facilitate phase selection with regard to thelight that should be applied to a sample (e.g., to the sample 116 inFIG. 1). Here, the system 200 includes a piezo fringe shifter 212. Insome implementations, the piezo fringe shifter 212 can receive lightfrom the grating 208 and/or 210 and can perform phase selection withregard to some or all of that light. For example, the piezo fringeshifter 212 can be used for controlling the pattern phase of thestructured light using which a particular image should be captured. Thepiezo fringe shifter 212 can include a piezo actuator. For example, apiezo piston system can be used to effectuate phase selection. Otherapproaches can be used. For example, a tilting optical plate can be usedfor phase selection. For example, the system 200 is here implemented ona board 214, and one or more areas of the board 214 can be tilted toaccomplish phase selection. As another example, one or more of thegratings 208 and 210 can be moved (e.g., translated) for the phaseselection, such as by a piezo actuator. Light emanating from the piezofringe shifter 212 is sometimes referred to as phase-selected light, toindicate that the light has been conditioned according to a particularphase selection. In some implementations, the gratings 208 and/or 210can be in a fixed position relative to the light source 204.

The system includes a projection lens 216 that can include one or moreoptical components (e.g., a lens) to condition light that is receivedfrom the piezo fringe shifter 212. For example, the projection lens 216can control the characteristics of the light before the light enters anobjective lens (e.g., the objective lens 114 in FIG. 1).

The rotatable mirror 202 can be used to redirect at least one beam oflight toward, and/or arriving from, one or more of the gratings 208 or210. The rotatable mirror 202 can include one or more materials so as tobe sufficiently reflective of the electromagnetic waves with which thesample is to be illuminated. In some implementations, the light from thelight source 204 includes a laser beam of one or more wavelengths. Forexample, a metal-coated mirror and/or a dielectric mirror can be used.The rotatable mirror 202 can be double-sided. For example, the rotatablemirror 202 can be considered double-sided if it is capable of performingreflection on at least part of both its sides (e.g., reflective at afirst end for a first beam path and reflective at a second end, oppositethe first end, for a second beam path).

The rotatable mirror 202 can include an elongate member. The rotatablemirror 202 can have any of a variety of form factors or other shapecharacteristics. The rotatable mirror 202 can have a generally flatconfiguration. The rotatable mirror 202 can have a substantially squareor otherwise rectangular shape. The rotatable mirror 202 can haverounded corners. The rotatable mirror 202 can have a substantiallyconstant thickness. The reflective surfaces of the rotatable mirror 202can be substantially planar.

The rotatable mirror 202 can be supported by an axle 218 of the system200. The axle 218 can allow the rotatable mirror 202 to be rotated aboutthe axle 218 in either or both directions. The axle 218 can be made of amaterial with sufficient rigidity to hold and manipulate the rotatablemirror 202, such material(s) including, but not limited to, metal. Theaxle 218 can be coupled substantially at a center of the rotatablemirror 202. For example, the rotatable mirror 202 can have an opening atthe center, or a cutout from one side that reaches the center, so as tofacilitate coupling with the axle 218. As another example, the axle 218can include separate axle portions that are coupled to respective facesof the rotatable mirror 202, without the need for any opening in therotatable mirror 202. The axle 218 can have at least one suspension 220.Here, the suspension 220 is positioned at the ends of the axle 218 onboth sides of the rotatable mirror 202. The suspension 220 can include abearing or other feature that facilitates low-friction operation.

The rotatable mirror 202 can be actuated to assume one or morepositions. Any form of motor or other actuator can be used forcontrolling the rotatable mirror 202. In some implementations, a steppermotor 222 is used. The stepper motor 222 can be coupled to the axle 218and be used for causing the axle 218, and thereby the rotatable mirror202, to rotate and assume the desired position(s). In someimplementations, the rotatable mirror 202 rotates in the same directiontoward the new positions (e.g., always clockwise, or alwayscounter-clockwise, about the rotation axis of the axle 218). In someimplementations, the rotatable mirror 202 reciprocates between two ormore positions (e.g., alternatingly clockwise or counter-clockwise,about the rotation axis of the axle 218).

FIGS. 3A-B show an example relating to the system 200 in FIG. 2. FIG. 3Ashows the system 200 in a top view, and FIG. 3B shows the system 200 ina perspective view. The rotatable mirror 202 is in the same position ineach of FIGS. 3A-B.

The light source 204 here generates light 300 that propagates toward thegrating 210. The rotatable mirror 202 is positioned (e.g., orientedabout the rotational axis of the axle 218) so that a first end 302 ofthe rotatable mirror 202 does not interrupt the light 300. Currently,the first end 302 may be positioned closer to the viewer than is thelight 300 which may propagate in the plane of the drawing. That is, areflective surface 202A of the rotatable mirror 202 that faces towardthe light source 204 currently does not interrupt the light 300 becausethe first end 302 does not block the path of the light 300. The light300 therefore propagates (through air, vacuum, or another fluid) untilreaching the grating 210.

The light 300 interacts with the grating 210 in one or more ways. Insome implementations, the light 300 undergoes diffraction based on thegrating 210. Here, light 304 is structured light (e.g., having one ormore pattern fringes) that emanates from the grating 210 based on theinteraction therewith by the light 300. The light 304 initiallypropagates substantially in a direction generally toward the projectionlens 216. However, the position of the rotatable mirror 202 is such thata second end 306 of the rotatable mirror 202 does interrupt the light304. The second end 306 can be opposite the first end 302. In someimplementations, the first end 302 and the second end 306 can bepositioned at any angle relative to each other, such as any anglebetween 0 degrees and 180 degrees. Currently, the second end 306 may bepositioned about as close to the viewer as is the light 304. That is, areflective surface 202B of the rotatable mirror 202 that faces towardthe grating 210 does interrupt the light 304 because the second end 306blocks the path of the light 304. From the light 304, the rotatablemirror 202 therefore directs light 308 toward the piezo fringe shifter212.

The piezo fringe shifter 212 performs phase selection on the light 308.For example, the piezo fringe shifter 212 selects the pattern phase towhich the sample is to be subjected in the present illumination (e.g.,for purposes of capturing one or more particular images). Light 310emanates from the piezo fringe shifter 212 and propagates toward, andenters, the projection lens 216. The light 310 corresponds to a specificphase selection made using the piezo fringe shifter 212. The light 310can therefore be characterized as phase-selected light. The light 310can then continue to propagate through the system (e.g., as in thesystem 100 in FIG. 1), for example to illuminate the sample 116.

Here, the characteristics of the phase-selected electromagnetic waves ofthe light 310 correspond to the fact that the light 300 is diffracted bythe grating 210 and that phase-selection is performed by the piezofringe shifter 212. The involvement of the grating 210, moreover, washere a result of the positioning of the rotatable mirror 202 so that thesecond end 306 thereof interrupted the light 304, whereas the first end302 did not interrupt the light 300.

Assume now that the rotatable mirror 202 instead is placed in adifferent position. FIGS. 4A-B show another example relating to thesystem 200 in FIG. 2. FIG. 4A shows the system 200 in a top view, andFIG. 4B shows the system 200 in a perspective view. The rotatable mirror202 is in the same position in each of FIGS. 4A-B.

The light source 204 here generates the light 300 that initiallypropagates toward the grating 210. The rotatable mirror 202 ispositioned (e.g., oriented about the rotational axis of the axle 218) sothat the first end 302 of the rotatable mirror 202 does interrupt thelight 300. Currently, the first end 302 may be positioned about as closeto the viewer as is the light 300. That is, the reflective surface 202Aof the rotatable mirror 202 that faces toward the light source 204 doesinterrupt the light 300 because the first end 302 blocks the path of thelight 300. Light 312 therefore propagates (through air, vacuum, oranother fluid) until reaching the grating 208.

The light 312 interacts with the grating 208 in one or more ways. Insome implementations, the light 312 undergoes diffraction based on thegrating 208. Here, light 314 is structured light (e.g., having one ormore pattern fringes) that emanates from the grating 208 based on theinteraction therewith by the light 312. The light 314 propagatessubstantially in a direction toward the piezo fringe shifter 212. Theposition of the rotatable mirror 202 is such that the second end 306 ofthe rotatable mirror 202 does not interrupt the light 314. Currently,the second end 306 may be positioned closer to the viewer than is thelight 314. That is, neither the reflective surface 202B of the rotatablemirror 202, nor a reflective surface 202C that faces toward the grating208, currently interrupts the light 314 because the second end 306 doesnot block the path of the light 314. The light 314 therefore propagatesuntil reaching the piezo fringe shifter 212.

The piezo fringe shifter 212 performs phase selection on the light 314.For example, the piezo fringe shifter 212 selects the pattern phase towhich the sample is to be subjected in the present illumination (e.g.,for purposes of capturing one or more particular images). Light 316emanates from the piezo fringe shifter 212 and propagates toward, andenters, the projection lens 216. The light 316 corresponds to a specificphase selection made using the piezo fringe shifter 212. The light 316can therefore be characterized as phase-selected light. The light 316can then continue to propagate through the system (e.g., as in thesystem 100 in FIG. 1), for example to illuminate the sample 116.

Here, the characteristics of the phase-selected electromagnetic waves ofthe light 316 correspond to the fact that the light 300 is diffracted bythe grating 208 and that phase-selection is performed by the piezofringe shifter 212. The involvement of the grating 208, moreover, washere a result of the positioning of the rotatable mirror 202 so that thefirst end 302 thereof interrupted the light 300, whereas the second end306 did not interrupt the light 314. The rotatable mirror 202 can becaused to repeatedly assume different positions (e.g., the ones of FIGS.3A-B and FIGS. 4A-B, respectively) by various rotations. For example,the rotatable mirror 202 can reciprocate between the FIGS. 3A-B positionand the FIGS. 4A-B position. As another example, the rotatable mirror202 can rotate in the same direction (e.g., clockwise orcounter-clockwise, from the perspective of the stepper motor 222) torepeatedly assume the FIGS. 3A-B position and the FIGS. 4A-B position.

As mentioned above, the gratings 208 and 210 can have different gratingorientations with respect to each other. For example, the gratings 208and 210 can have grating orientations that are substantiallyperpendicular to each other. The light 304 (FIG. 3A), emanating from thegrating 210, and the light 314 (FIG. 4A), emanating from the grating208, can therefore have different characteristics. For example, thepattern of fringes can be different in one of the lights 304 and 314than in the other. Illuminating the sample (e.g., the sample 116 inFIG. 1) with differently structured light can facilitate use of thesystem 200 for SIM imaging.

The above examples illustrate a system that includes a light source(e.g., the light source 204); a first grating (e.g., the grating 210)and a second grating (e.g., the grating 208); a phase selector (e.g.,the piezo fringe shifter 212); and at least one reflective component(e.g., the rotatable mirror 202). In a first position (e.g., as shown inFIGS. 3A-B) the reflective component forms a first light path from thelight source to the first grating (e.g., by the first end 302 notinterrupting the light 300) and thereafter to the phase selector (e.g.,by the second end 306 blocking the light 304). In a second position(e.g., as shown in FIGS. 4A-B), the reflective component forms a secondlight path from the light source to the second grating (e.g., by thefirst end 302 blocking the light 300) and thereafter to the phaseselector (e.g., by the second end 306 not interrupting the light 304).

The above examples also illustrate a system that includes a light source(e.g., the light source 204); a first grating (e.g., the grating 208)and a second grating (e.g., the grating 210); a phase selector (e.g.,the piezo fringe shifter 212); and at least one mirror (e.g., therotatable mirror 202). Particularly, the mirror has a first position(e.g., as shown in FIGS. 4A-B) that interrupts (e.g., by the first end302) a first path from the light source to the second grating, while notinterrupting (e.g., by the second end 306 not blocking the light 314) asecond path from the first grating to the phase selector. The mirror hasa second position (e.g., as shown in FIGS. 3A-B) that interrupts (e.g.,by the second end 306) a third path from the second grating and directssecond light (e.g., the light 308) toward the phase selector, while notinterrupting the first path (e.g., by the first end 302 not blocking thelight 300).

Examples herein relate to using a reflective component and one or moregratings to provide structured light which can be used for SIM imaging.In some implementations, the mechanical motion can be significant (e.g.,by rotating a mirror or another reflective component). However,reasonable mechanical and motion tolerances can be provided. Forexample, less or no precision may be needed regarding the start or stoppositions of a reflective component (e.g., a mirror or a prism mirror);and stability and repeatability can be provided (e.g., with a rotatablemirror) by using precision bearings (e.g., in the suspension 220), aprecision spindle (e.g., in the axle 218), and/or an accurate mirror(e.g., with the rotatable mirror 202 having low runout and/or goodflatness). The stability and repeatability may be made independent ofparts that can wear out (e.g., guide ways and/or end stops).

FIG. 5 schematically shows another example of a system 500 that can beused as part of a SIM imaging system. The system 500 can be used incombination with one or more other examples described herein. The system500 includes a light source 502, a mirror 504, a grating 506 and agrating 508, a mirror 510, a phase selector 512, and a projection lens514. An individual component of the system 500 can perform a similar oridentical function to a corresponding component described with referenceto another example in this description. Here, the gratings 506 and 508face toward each other. In some implementations, the gratings 506 and508 can have different grating orientations, including, but not limitedto, ones that are substantially perpendicular to each other or at anyother angle relative to each other. In some implementations, thegratings 506 and 508 can be at offset positions relative to the mirror504 and/or mirror 510.

A Cartesian coordinate system having respective x-, y- and z-axes isshown. Here, the x- and y-axes extend in the plane of the illustration,and the z-axis extends perpendicularly to the x- and y-axes in adirection toward the viewer.

A path 516 is marked between the light source 502 and the grating 508.In this and other examples, a path can indicate the way that a lightbeam can travel unless it is interrupted by some structure. A path 517is marked between the mirror 504 and the grating 506. A path 518 ismarked between the grating 506 and the phase selector 512. A path 520 ismarked from the grating 508 extending, in this example, to the side ofthe projection lens 514. The paths 516, 517, 518, 520 are hereillustrated using dashed lines.

The light source 502 here generates light 522 along at least part of thepath 516. If the position of the mirror 504 is such that the mirror 504does not interrupt the path 516 and does not block the light 522, thenthe light 522 can propagate along the path 516 and reach the grating508. That is, the mirror 504 can then be considered as forming a lightpath of the light 522, the light path extending from the light source502 to the grating 508. On the other hand, if the position of the mirror504 is such that the mirror 504 interrupts the path 516 and blocks thelight 522, then the mirror 504 can reflect the light 522, and light 524can propagate along the path 517 toward the grating 506. The redirectedlight 524 is here indicated by a dot-dash line. That is, the mirror 504can then be considered as forming a light path of the light 522 and thelight 524, the light path extending from the light source 502 to thegrating 506. Thus, the mirror 504 can selectively redirect the light 522from the light source 502 between two paths toward a selected one of thegratings 506 or 508 based on the position of mirror 504.

The mirror 510 can selectively redirect light from a selected one of thegratings 506 or 508 toward the phase selector 512 based on the positionof mirror 510. If the mirror 504 does not interrupt the path 516 suchthat light 526 is emanating from the grating 508 and the position of themirror 510 is such that the mirror 510 interrupts the path 520 andblocks light 526 emanating from the grating 508, then the mirror 510 canreflect light 528 toward the phase selector 512. That is, the mirrors504 and 510 can then be considered as cooperatively forming a light pathof the light 522, the light 526 and the light 528, the light pathextending from the light source 502 to the phase selector 512. On theother hand, if the mirror 504 does interrupt the path 516 such thatlight 524 is redirected toward the grating 506 and the position of themirror 510 is such that the mirror 510 does not interrupt the path 518and does not block light 530, then the light 530 can propagate along thepath 518 and reach the phase selector 512. The light 530 is hereindicated by a dot-dash line. That is, the mirrors 504 and 510 can thenbe considered as cooperatively forming a light path of the light 522,the light 524, and the light 530, the light path extending from thelight source 502 to the phase selector 512.

The paths 516, 517, 518 and 520 can define one or more planes dependingon the orientation of the components of the system 500. Here, the lightpath that includes the light 522, the light 526 and the light 528extends substantially in the x-y-plane as illustrated (e.g., in theplane of the drawing). Similarly, the light path that includes the light522, the light 524 and the light 530 also extends substantially in thex-y-plane. At least one aspect of the system 500 can be substantiallyaligned with one or more such planes. In some implementations, themirrors 504 and 510 are part of a rotatable mirror (e.g., the rotatablemirror 202 in FIG. 2). For example, such a rotatable mirror can revolveat least partially about an axis 532 here schematically indicatedbetween the mirrors 504 and 510. The axis 532 can be substantiallyparallel to the plane of one or more of the light paths. For example,the axis 532 can be offset from the plane in some direction (e.g.,toward the viewer, similar to the positioning of the axle 218 in FIG.2). In some implementations, one or more of the lights 522, 524, 526,528, and/or 530 can propagate along a plane forming an angle relative tothe x-y plane (i.e., in a direction toward or away from the viewer) soas to form a light path having components in the x-, y-, and z-axes.

FIG. 6 schematically shows an example of a system 600 having atranslatable mirror 602. The translatable mirror 602 is hereschematically illustrated using a dashed outline. Examples of thetranslatable mirror 602 will be given below. The system 600 can be usedin combination with one or more other examples described herein. Thesystem 600 includes a light source 604, a grating 606 and a grating 608,and a phase selector 610. An individual component of the system 600 canperform a similar or identical function to a corresponding componentdescribed with reference to another example in this description.

The translatable mirror 602 can include one or more mirrors that canundergo translation (in one or more directions) as part of the operationof the system 600. The translatable mirror 602 can be translated into afirst position where the translatable mirror 602 forms a light path 612from the light source 604 to the grating 606 and thereafter to the phaseselector 610. The translatable mirror 602 can be translated into asecond position where the translatable mirror 602 forms a light path 614from the light source 604 to the grating 608 and thereafter to the phaseselector 610. Thus, the translatable mirror 602 can selectively redirectthe light from the light source 604 between the two light paths 612 and614 toward the phase selector 610.

The gratings 606 and 608 can be placed in any of various positionsrelative to each other. The orientation of the grating 606 can becharacterized using a normal 616 of the grating 606. For example, thenormal 616 can be a vector defined to be perpendicular to an opticallyactive surface of the grating 606. The orientation of the grating 608can be characterized using a normal 618 of the grating 608. For example,the normal 618 can be a vector defined to be perpendicular to anoptically active surface of the grating 608. In some implementations,the normals 616 and 618 are substantially aligned with each other. Forexample, the normals 616 and 618 can be substantially antiparallel toeach other (e.g., oriented toward each other). In other implementations,the normals 616 and 618 can form an angle between the normals 616 and618.

The light paths 612 and 614 can define one or more planes depending onthe orientation of the components of the system 600. Here, each of thelight paths 612 and 614 extends substantially in the plane of thedrawing. In other implementations, the light paths 612 and/or 614 canhave one or more portions that extend out of or in to the plane of thedrawing. At least one aspect of the system 600 can be substantiallyaligned with one or more such planes of the light paths 612 or 614. Insome implementations, the translatable mirror 602 can undergotranslation that is substantially perpendicular to the plane of thelight paths 612 and 614. In some implementations, the translatablemirror 602 can undergo translation that is substantially parallel to theplane of the light paths 612 and 614. Combinations of these approachescan be used. In some implementations, a first side of the translatablemirror 602 can have a first reflective angle (e.g., to form light path612) and a second side of the translatable mirror 602 can have a secondreflective angle (e.g., to form light path 614), where the firstreflective angle is different from the second reflective angle.

FIGS. 7A-B schematically show an example relating to the system 600 inFIG. 6. The described examples can be used in combination with one ormore other examples described herein. A translatable mirror 602′ is hereschematically illustrated. The translatable mirror 602′ can be used as,or as part of, the translatable mirror 602 in FIG. 6. That is, a pair ofmirrors 700 and 704 when in a first translated position shown in FIG. 7Acan form light path 614 and the pair of mirrors 700 and 704 when in asecond translated position shown in FIG. 7B can form light path 612. Thetranslatable mirror 602′ includes a mirror 700 coupled to a track 702.Here, the mirror 700 has a rectangular shape and a side 700A of themirror 700 faces a side 702A of the track 702. The track 702 canfacilitate translation of the mirror 700 vertically along the side 702A.For example, an actuator (not shown) can act on the mirror 700 andrelocate it in either direction along the track 702. Similarly, thetranslatable mirror 602′ includes a mirror 704 having a rectangularshape and coupled to a track 706 so that a side 704A of the mirror 704faces a side 706A of the track 706. Accordingly, the track 706 canfacilitate translation of the mirror 704 vertically along the side 706A.More than one track can be used for translation of the mirror 700 and/or704. Other types of actuation can be used. For example, the mirror 700and/or 704 can be manipulated by an actuator.

FIG. 7A shows a configuration of the translatable mirror 602′ with themirror 700 positioned toward an end 708 of the track 702, and the mirror704 positioned toward an end 710 of the track 706. In someimplementations, the position in FIG. 7A can correspond to the formationof one or more light paths. For example, with reference again also toFIG. 6, the position of the mirror 704 toward the end 710 can facilitateinterruption of the light path 612 between the light source 604 and thegrating 606. Due to the blocking, the mirror 704 can serve to redirectlight from the light source 604 toward the grating 608 and in so doingcan form the light path 614. The mirror 700, moreover, which iscurrently positioned toward the end 708, may not interrupt the lightpath 614 between the grating 608 and the phase selector 610. As such,the translation of the translatable mirror 602′ into the shownconfiguration can form the light path 614 in the system 600.

FIG. 7B shows a configuration of the translatable mirror 602′ with themirror 700 positioned toward an end 712 of the track 702, and the mirror704 positioned toward an end 714 of the track 706. The end 712 is heresubstantially opposite the end 708, and the end 714 is heresubstantially opposite the end 710. In some implementations, theposition in FIG. 7B can correspond to the formation of one or more lightpaths. For example, with reference again also to FIG. 6, the position ofthe mirror 704 toward the end 714 may not interrupt the light path 612from the light source 604, and the light may therefore reach the grating606. The mirror 700, moreover, which is currently positioned toward theend 712, may interrupt the light path 612 emanating from the grating606. Due to the blocking, the mirror 700 can serve to redirect lightfrom the grating 606 toward the phase selector 610 and in so doing canform the light path 612. As such, the translation of the translatablemirror 602′ into the shown configuration can form the light path 612 inthe system 600. The translation to or from the positions shows in FIGS.7A-B can occur in a direction that is substantially perpendicular to oneor more of the planes of the light paths 612 and 614.

FIGS. 8A-B schematically show another example relating to the system 600in FIG. 6. The described examples can be used in combination with one ormore other examples described herein. A translatable mirror 602″ is hereschematically illustrated. The translatable mirror 602″ can be used as,or as part of, the translatable mirror 602 in FIG. 6. The translatablemirror 602″ includes a mirror 800 coupled to a track 802. Here, themirror 800 has a rectangular shape and a side 800A of the mirror 800faces a side 802A of the track 802. The track 802 can facilitatetranslation of the mirror 800 along the side 802A. For example, anactuator (not shown) can act on the mirror 800 and relocate it in eitherdirection along the track 802.

FIG. 8A shows a configuration of the translatable mirror 602″ with themirror 800 positioned toward an end 804 of the track 802. In someimplementations, the position in FIG. 8A can correspond to the formationof one or more light paths. For example, with reference again also toFIG. 6, the position of the mirror 800 toward the end 804 can facilitateinterruption of the light path 612 between the light source 604 and thegrating 606. Due to the blocking, the mirror 800 can serve to redirectlight from the light source 604 toward the grating 608 and in so doingcan form the light path 614. At an end 806 of the track 802 no mirror iscurrently positioned. As a result, the translatable mirror 602″ may notinterrupt the light path 614 between the grating 608 and the phaseselector 610. As such, the translation of the translatable mirror 602″into the shown configuration can form the light path 614 in the system600.

FIG. 8B shows a configuration of the translatable mirror 602″ with themirror 800 positioned toward the end 806 of the track 802. In someimplementations, the position in FIG. 8B can correspond to the formationof one or more light paths. For example, with reference again also toFIG. 6, the absence of a mirror at the end 804 can facilitatepropagation of the light from the light source 604 to the grating 606.Moreover, the position of the mirror 800 toward the end 806 canfacilitate interruption of the light path 612 emanating from the grating606. Due to the blocking, the mirror 800 can serve to redirect lightfrom the grating 606 toward the phase selector 610 and in so doing canform the light path 612.

FIG. 9 schematically shows an example of a system 900 having a rotatableprism 902. The system 900 can be used in combination with one or moreother examples described herein. The system 900 also includes a lightsource 904, a grating 906 and a grating 908, a phase selector 910, and aprojection lens 912. An individual component of the system 900 canperform a similar or identical function to a corresponding componentdescribed with reference to another example in this description.

The rotatable prism 902 can undergo rotation about one or morerotational axes to assume one or more positions. Here, the rotatableprism 902 can be rotated about an axis perpendicular to the plane of thedrawing, the rotation schematically indicated by an arrow 914. Forsimplicity, the rotatable prism 902 is here shown in a singleorientation. However, the operation of the system 900 will beexemplified based on at least two different orientations of therotatable prism 902. Here, the gratings 906 and 908 face toward thephase selector 910. Other placements or orientations can be used.

The light source 904 provides light 916 that propagates toward therotatable prism 902. The light 916 will interact with the rotatableprism 902 and undergo reflection. Here, light 918 emanating from therotatable prism 902 is the result of such reflection when the rotatableprism 902 is in a first position. The light 918 is directed toward thegrating 906 and interacts therewith. Light 920 emanates from the grating906 as a result of this interaction and propagates toward the phaseselector 910 and interacts therewith. Light 922 emanates from the phaseselector 910 as a result of this interaction and propagates toward theprojection lens 912 and interacts therewith. That is, when the rotatableprism 902 is in the first position, it reflects the light 918 along afirst light path from the rotatable prism 902 toward the grating 906.

Moreover, light 924 emanating from the rotatable prism 902 is the resultof reflection of the light 916 when the rotatable prism 902 is in asecond position. The light 924 is directed toward the grating 908 andinteracts therewith. Light 926 emanates from the grating 908 as a resultof this interaction and propagates toward the phase selector 910 andinteracts therewith. The light 922 emanates from the phase selector 910as a result of this interaction and propagates toward the projectionlens 912 and interacts therewith. That is, when the rotatable prism 902is in the second position, it reflects the light 924 along a secondlight path from the rotatable prism 902 toward the grating 908.

FIG. 10 shows an example of a method 1000 that can be used forperforming SIM. The method 1000 can be performed in one or more of thesystems exemplified herein. The method 1000 can include more or feweroperations than shown. Two or more of the operations of the method 1000can be performed in a different order unless otherwise indicated. Someaspects of other examples described herein will be referenced forillustrative purposes.

At 1010, the method 1000 includes positioning of a reflective componentin a first position. The first position can facilitate definition of afirst light path originating at a light source and extending to a firstgrating and thereafter to a subsequent component. For example, therotatable mirror 202 can be placed in the position shown in FIGS. 3A-Bto define the light path from the light source 204 to the grating 210and thereafter to the piezo fringe shifter 212, the light path includingthe light 300, 304 and 308. As another example, the rotatable mirror 202can be placed in the position shown in FIGS. 4A-B to define the lightpath from the light source 204 to the grating 208 and thereafter to thepiezo fringe shifter 212, the light path including the light 300, 312and 314. As another example, the mirrors 504 and 510 in FIG. 5 can beplaced to define the light path that includes the light 522, 526 and528. As another example, the mirrors 504 and 510 in FIG. 5 can be placedto define the light path that includes the light 522, 524 and 530. Asanother example, the translatable mirror 602′ can be placed in theposition shown in FIG. 7A to define the light path 614 in FIG. 6. Asanother example, the translatable mirror 602′ can be placed in theposition shown in FIG. 7B to define the light path 612 in FIG. 6. Asanother example, the translatable mirror 602″ can be placed in theposition shown in FIG. 8A to define the light path 614 in FIG. 6. Asanother example, the translatable mirror 602″ can be placed in theposition shown in FIG. 8B to define the light path 612 in FIG. 6. Asanother example, the rotatable prism 902 in FIG. 9 can be placed in theposition that defines the light path that includes the light 916, 918,920 and 922. As another example, the rotatable prism 902 in FIG. 9 canbe placed in the position that defines the light path that includes thelight 916, 924, 926 and 922. For example, the subsequent component canbe the phase selector 108 in FIG. 1. As another example, the subsequentcomponent can be the projection lens 110 in FIG. 11.

At 1020, the method 1000 includes directing first phase-selected lightfrom the first light path onto a sample. For example, phase-selectedlight can be emanating from the piezo fringe shifter 212 (FIG. 2) and/orfrom one or more of the phase selectors 108 (FIG. 1), 512 (FIG. 5), 610(FIG. 6) or 910 (FIG. 9). The phase-selected light can be directed ontothe sample 116 in FIG. 1. Thus, the sample can be illuminated using thephase-selected light (e.g., structured light). The sample can be imaged(e.g., using the camera system 122 in FIG. 1) based on such illuminationby the first phase-selected light and such operations are not explicitlydiscussed here for brevity.

At 1030, the method 1000 includes positioning of a reflective componentin a second position. The second position can facilitate definition of asecond light path originating at the light source and extending to asecond grating and thereafter to the subsequent component. For example,the rotatable mirror 202 can be placed in the position shown in FIGS.3A-B to define the light path from the light source 204 to the grating210 and thereafter to the piezo fringe shifter 212, the light pathincluding the light 300, 304 and 308. As another example, the rotatablemirror 202 can be placed in the position shown in FIGS. 4A-B to definethe light path from the light source 204 to the grating 208 andthereafter to the piezo fringe shifter 212, the light path including thelight 300, 312 and 314. As another example, the mirrors 504 and 510 inFIG. 5 can be placed to define the light path that includes the light522, 526 and 528. As another example, the mirrors 504 and 510 in FIG. 5can be placed to define the light path that includes the light 522, 524and 530. As another example, the translatable mirror 602′ can be placedin the position shown in FIG. 7A to define the light path 614 in FIG. 6.As another example, the translatable mirror 602′ can be placed in theposition shown in FIG. 7B to define the light path 612 in FIG. 6. Asanother example, the translatable mirror 602″ can be placed in theposition shown in FIG. 8A to define the light path 614 in FIG. 6. Asanother example, the translatable mirror 602″ can be placed in theposition shown in FIG. 8B to define the light path 612 in FIG. 6. Asanother example, the rotatable prism 902 in FIG. 9 can be placed in theposition that defines the light path that includes the light 916, 918,920 and 922. As another example, the rotatable prism 902 in FIG. 9 canbe placed in the position that defines the light path that includes thelight 916, 924, 926 and 922.

At 1040, the method 1000 includes directing second phase-selected lightfrom the second light path onto the sample. For example, phase-selectedlight can be emanating from the piezo fringe shifter 212 (FIG. 2) and/orfrom one or more of the phase selectors 108 (FIG. 1), 512 (FIG. 5), 610(FIG. 6) or 910 (FIG. 9). The phase-selected light can be directed ontothe sample 116 in FIG. 1. Thus, the sample can be illuminated using thephase-selected light (e.g., structured light). The sample can be imaged(e.g., using the camera system 122 in FIG. 1) based on such illuminationby the second phase-selected light and such operations are notexplicitly discussed here for brevity.

FIG. 11 schematically shows another example of a system 1100 that canfacilitate SIM. The system 1100 can be used in combination with one ormore other examples described herein. Some components in this and otherexamples are shown conceptually as a block or other generic component;such component(s) can be implemented in form of one or more separate orintegrated components so as to perform the indicated function(s).Components corresponding to those of the system 100 (FIG. 1) that arenot explicitly mentioned can serve the same or a similar role in thesystem 1100.

The system 1100 includes a phase selector 108′ positioned before alight-structuring component 104′. In some implementations, the phaseselector 108′ can receive the beam 106 from the light source 102. Thephase selector 108′ can provide phase-selected light to thelight-structuring component 104′. The light-structuring component 104′can generate structured light and provide the structured light to asubsequent component in the system 1100. In some implementations, thesubsequent component is the projection lens 110. Other approaches can beused.

In some implementations, the stage 118 can translate the sample 116 adistance relative to stationary light fringes to accomplish phaseselection (e.g., using a piezo actuator in the stage 118). For example,the phase selector 108′ can then be bypassed in, or eliminated from, thesystem 1100.

FIG. 12 is a schematic view of an example system 1200 that can be usedfor biological and/or chemical analysis. Systems and/or techniquesdescribed herein, including, but not limited to, the system 100 (FIG. 1)and/or the method 1000 (FIG. 10), can be part of the system 1200 in someimplementations. The system 1200 can operate to obtain any informationor data that relates to at least one biological and/or chemicalsubstance. In some implementations, a carrier 1202 supplies material tobe analyzed. For example, the carrier 1202 can include a cartridge orany other component holding the material. In some implementations, thesystem 1200 has a receptacle 1204 to receive the carrier 1202 at leastduring the analysis. The receptacle 1204 can form an opening in ahousing 1206 of the system 1200. For example, some or all components ofthe system 1200 can be within the housing 1206.

The system 1200 can include an optical system 1208 for biological and/orchemical analysis of the material(s) of the carrier 1202. The opticalsystem 1208 can perform one or more optical operations, including, butnot limited to, illumination and/or imaging of the material(s). Forexample, the optical system 1208 can include any or all systemsdescribed elsewhere herein. As another example, the optical system 1208can perform any or all operations described elsewhere herein.

The system 1200 can include a thermal system 1210 for providing thermaltreatment relating to biological and/or chemical analysis. In someimplementations, the thermal system 1210 thermally conditions at leastpart of the material(s) to be analyzed and/or the carrier 1202.

The system 1200 can include a fluid system 1212 for managing one or morefluids relating to biological and/or chemical analysis. In someimplementations, the fluid(s) can be provided for the carrier 1202 orits material(s). For example, fluid can be added to and/or removed fromthe material of the carrier 1202.

The system 1200 includes a user interface 1214 that facilitates inputand/or output relating to biological and/or chemical analysis. The userinterface can be used to specify one or more parameters for theoperation of the system 1200 and/or to output results of biologicaland/or chemical analysis, to name just a few examples. For example, theuser interface 1214 can include one or more display screens (e.g., atouchscreen), a keyboard, and/or a pointing device (e.g., a mouse or atrackpad).

The system 1200 can include a system controller 1216 that can controlone or more aspects of the system 1200 for performing biological and/orchemical analysis. The system controller 1216 can control the receptacle1204, the optical system 1208, the thermal system 1210, the fluid system1212, and/or the user interface 1214. The system controller 1216 caninclude at least one processor and at least one storage medium (e.g., amemory) with executable instructions for the processor.

FIG. 13 shows an example of a system 1300 having a rotatable mirror1302. In some implementations, the system 1300 can be characterized as aRIGS. The system 1300 can be used in combination with one or more otherexamples described herein. An individual component of the system 1300can perform a similar or identical function to a corresponding componentdescribed with reference to another example in this description.

The system 1300 includes a light source 1304. In some implementations,the light source 1304 provides light that it in turn receives through atleast one fiber optic cable 1306. For example, the light source 1304 andthe fiber optic cable 1306 can collectively be considered a fiber launchmodule.

The system 1300 includes a grating 1308 and a grating 1310. In someimplementations, the grating 1308 and/or 1310 can serve as a diffractivecomponent with regard to light from the light source 1304. For example,the grating 1308 and/or 1310 can comprise a substrate with a periodicstructure, the substrate combined with a prism. The gratings 1308 and1310 can be positioned relative to each other according to one or morearrangements. Here, the gratings 1308 and 1310 face each other in thesystem 1300. The gratings 1308 and 1310 can be substantially identicalto each other or can have one or more differences. The size, periodicityor other spatial aspect of one of the gratings 1308 and 1310 can differfrom that/those of the other. The grating orientation (i.e., the spatialorientation of the periodic structure) of one of the gratings 1308 and1310 can differ from that/those of the other. In some implementations,the respective grating orientations of the gratings 1308 and 1310, whichgratings themselves face toward each other, can be substantiallyperpendicular to each other or at any other angle relative to eachother. In some implementations, the gratings 1308 and 1310 can be atoffset positions relative to the rotatable mirror 1302. In someimplementations, the gratings 1308 and/or 1310 can be in a fixedposition relative to the light source 1304.

The system 1300 can include one or more components (e.g., as a phaseselector 108 of FIG. 1) to facilitate phase selection with regard to thelight that should be applied to a sample (e.g., to the sample 116 inFIG. 1). Here, the system 1300 includes a piezo fringe shifter 1312. Insome implementations, the piezo fringe shifter 1312 can receive lightfrom the grating 1308 and/or 1310 and can perform phase selection withregard to some or all of that light. For example, the piezo fringeshifter 1312 can be used for controlling the pattern phase of thestructured light using which a particular image should be captured. Thepiezo fringe shifter 1312 can include a piezo actuator. For example, apiezo piston system can be used to effectuate phase selection. Otherapproaches can be used. For example, a tilting optical plate can be usedfor phase selection. For example, the system 1300 is here implemented ona board 1314, and one or more areas of the board 1314 can be tilted toaccomplish phase selection. As another example, one or more of thegratings 1308 and 1310 can be moved (e.g., translated) for the phaseselection, such as by a piezo actuator. Light emanating from the piezofringe shifter 1312 is sometimes referred to as phase-selected light, toindicate that the light has been conditioned according to a particularphase selection. In some implementations, the gratings 1308 and/or 1310can be in a fixed position relative to the light source 1304.

The system includes a projection lens 1316 that can include one or moreoptical components (e.g., a lens) to condition light that is receivedfrom the piezo fringe shifter 1312. For example, the projection lens1316 can control the characteristics of the light before the lightenters an objective lens (e.g., the objective lens 114 in FIG. 1).

The rotatable mirror 1302 can be used to redirect at least one beam oflight toward, and/or arriving from, one or more of the gratings 1308 or1310. The rotatable mirror 1302 can include one or more materials so asto be sufficiently reflective of the electromagnetic waves with whichthe sample is to be illuminated. In some implementations, the light fromthe light source 1304 includes a laser beam of one or more wavelengths.For example, a metal-coated mirror and/or a dielectric mirror can beused. The rotatable mirror 1302 can be double-sided. For example, therotatable mirror 1302 can be considered double-sided if it is capable ofperforming reflection on at least part of both its sides (e.g.,reflective at a first end for a first beam path and reflective at asecond end, opposite the first end, for a second beam path).

The rotatable mirror 1302 can include an elongate member. The rotatablemirror 1302 can have any of a variety of form factors or other shapecharacteristics. The rotatable mirror 1302 can have a generally flatconfiguration. The rotatable mirror 1302 can have a substantially squareor otherwise rectangular shape. The rotatable mirror 1302 can haverounded corners. The rotatable mirror 1302 can have a substantiallyconstant thickness. The reflective surfaces of the rotatable mirror 1302can be substantially planar.

The rotatable mirror 1302 can be supported by an axle 1318 of the system1300. The axle 1318 can allow the rotatable mirror 1302 to be rotatedabout the axle 1318 in either or both directions. The axle 1318 can bemade of a material with sufficient rigidity to hold and manipulate therotatable mirror 1302, such material(s) including, but not limited to,metal. The axle 1318 can be coupled substantially at a center of therotatable mirror 1302. For example, the rotatable mirror 1302 can havean opening at the center, or a cutout from one side that reaches thecenter, so as to facilitate coupling with the axle 1318. As anotherexample, the axle 1318 can include separate axle portions that arecoupled to respective faces of the rotatable mirror 1302, without theneed for any opening in the rotatable mirror 1302. The axle 1318 canhave at least one suspension 1320. Here, the suspension 1320 ispositioned at the ends of the axle 1318 on both sides of the rotatablemirror 1302. The suspension 1320 can include a bearing or other featurethat facilitates low-friction operation.

The rotatable mirror 1302 can be actuated to assume one or morepositions. Any form of motor or other actuator can be used forcontrolling the rotatable mirror 1302. In some implementations, astepper motor 1322 is used. The stepper motor 1322 can be coupled to theaxle 1318 and be used for causing the axle 1318, and thereby therotatable mirror 1302, to rotate and assume the desired position(s). Insome implementations, the rotatable mirror 1302 rotates in the samedirection toward the new positions (e.g., always clockwise, or alwayscounter-clockwise, about the rotation axis of the axle 1318). In someimplementations, the rotatable mirror 1302 reciprocates between two ormore positions (e.g., alternatingly clockwise or counter-clockwise,about the rotation axis of the axle 1318).

The light source 1304 here generates light 1324 which includes light1324A that propagates between the light source 1304 and a mirror 1326.The light 1324 is schematically illustrated in the present figure toexemplify different possibilities of propagation. The mirror 1326 can beused to reflect the light 1324A into light 1324B directed toward therotatable mirror 1302 and/or the grating 1310. The mirror 1326 caninclude one or more materials so as to be sufficiently reflective of theelectromagnetic waves with which the sample is to be illuminated. Insome implementations, the light from the light source 1304 includes alaser beam of one or more wavelengths. For example, a metal-coatedmirror and/or a dielectric mirror can be used.

The rotatable mirror 1302 is positioned (e.g., oriented about therotational axis of the axle 1318) so that a first end 1328 of therotatable mirror 1302 does not interrupt the light 1324B. Currently, thefirst end 1328 may be positioned closer to the viewer than is the light1324B which may propagate in the plane of the drawing. That is, areflective surface 1302A of the rotatable mirror 1302 that faces towardthe light source 1304 currently does not interrupt the light 1324Bbecause the first end 1328 does not block the path of the light 1324B.The light 1324B therefore propagates (through air, vacuum, or anotherfluid) until reaching the grating 1310.

The light 1324B interacts with the grating 1310 in one or more ways. Insome implementations, the light 1324B undergoes diffraction based on thegrating 1310. Here, light 1324C is structured light (e.g., having one ormore pattern fringes) that emanates from the grating 1310 based on theinteraction therewith by the light 1324B. The light 1324C initiallypropagates substantially in a direction generally toward the side of theprojection lens 1316. However, the position of the rotatable mirror 1302is such that a second end 1330 of the rotatable mirror 1302 doesinterrupt the light 1324C. The second end 1330 can be opposite the firstend 1328. In some implementations, the first end 1328 and the second end1330 can be positioned at any angle relative to each other, such as anyangle between 0 degrees and 180 degrees. Currently, the second end 1330may be positioned about as close to the viewer as is the light 1324C.That is, a reflective surface 1302B of the rotatable mirror 1302 thatfaces toward the grating 1310 does interrupt the light 1324C because thesecond end 1330 blocks the path of the light 1324C. From the light1324C, the rotatable mirror 1302 therefore directs light 1324D towardthe piezo fringe shifter 1312.

The piezo fringe shifter 1312 performs phase selection on the light1324D. For example, the piezo fringe shifter 1312 selects the patternphase to which the sample is to be subjected in the present illumination(e.g., for purposes of capturing one or more particular images). Light1324E emanates from the piezo fringe shifter 1312 and propagates toward,and enters, the projection lens 1316. The light 1324E corresponds to aspecific phase selection made using the piezo fringe shifter 1312. Thelight 1324E can therefore be characterized as phase-selected light. Thelight 1324E can then continue to propagate through the system (e.g., asin the system 100 in FIG. 1), for example to illuminate the sample 116.

Here, the characteristics of the phase-selected electromagnetic waves ofthe light 1324E correspond to the fact that the light 1324B isdiffracted by the grating 1310 and that phase-selection is performed bythe piezo fringe shifter 1312. The involvement of the grating 1310,moreover, was here a result of the positioning of the rotatable mirror1302 so that the second end 1330 thereof interrupted the light 1324C,whereas the first end 1328 did not interrupt the light 1324B.

Assume now that the rotatable mirror 1302 instead is placed in adifferent position. Similar to the previous example, the light source1304 here generates the light 1324A that initially propagates toward themirror 1326. However, unlike the previous example, the rotatable mirror1302 is here positioned (e.g., oriented about the rotational axis of theaxle 1318) so that the first end 1328 of the rotatable mirror 1302 doesinterrupt the light 1324B. Currently, the first end 1328 may bepositioned about as close to the viewer as is the light 1324B. That is,the reflective surface 1302A of the rotatable mirror 1302 that facestoward the light source 1304 does interrupt the light 1324B because thefirst end 1328 blocks the path of the light 1324B. Light 1324F thereforepropagates (through air, vacuum, or another fluid) until reaching thegrating 1308.

The light 1324F interacts with the grating 1308 in one or more ways. Insome implementations, the light 1324F undergoes diffraction based on thegrating 1308. Here, light 1324G is structured light (e.g., having one ormore pattern fringes) that emanates from the grating 1308 based on theinteraction therewith by the light 1324F. The light 1324G propagatessubstantially in a direction toward the piezo fringe shifter 1312. Theposition of the rotatable mirror 1302 is such that the second end 1330of the rotatable mirror 1302 does not interrupt the light 1324G.Currently, the second end 1330 may be positioned closer to the viewerthan is the light 1324G. That is, neither the reflective surface 1302Bof the rotatable mirror 1302, nor a reflective surface 1302C that facestoward the grating 1308, currently interrupts the light 1324G becausethe second end 1330 does not block the path of the light 1324G. Thelight 1324G therefore propagates until reaching the piezo fringe shifter1312.

The piezo fringe shifter 1312 performs phase selection on the light1324G. For example, the piezo fringe shifter 1312 selects the patternphase to which the sample is to be subjected in the present illumination(e.g., for purposes of capturing one or more particular images). Light1324E emanates from the piezo fringe shifter 1312 and propagates toward,and enters, the projection lens 1316, similar to the examples describedabove.

Here, the characteristics of the phase-selected electromagnetic waves ofthe light 1324E correspond to the fact that the light 1324F isdiffracted by the grating 1308 and that phase-selection is performed bythe piezo fringe shifter 1312. The involvement of the grating 1308,moreover, was here a result of the positioning of the rotatable mirror1302 so that the first end 1328 thereof interrupted the light 1324B,whereas the second end 1330 did not interrupt the light 1324G. Therotatable mirror 1302 can be caused to repeatedly assume differentpositions (e.g., the ones described in the present examples,respectively) by various rotations. For example, the rotatable mirror1302 can reciprocate between these positions. As another example, therotatable mirror 1302 can rotate in the same direction (e.g., clockwiseor counter-clockwise, from the perspective of the stepper motor 1322) torepeatedly assume the positions.

As mentioned above, the gratings 1308 and 1310 can have differentgrating orientations with respect to each other. For example, thegratings 1308 and 1310 can have grating orientations that aresubstantially perpendicular to each other. The light 1324C emanatingfrom the grating 1310, and the light 1324G, emanating from the grating1308, can therefore have different characteristics. For example, thepattern of fringes can be different in one of the lights 1324C and 1324Gthan in the other. Illuminating the sample (e.g., the sample 116 inFIG. 1) with differently structured light can facilitate use of thesystem 1300 for SIM imaging.

The above examples illustrate a system that includes a light source(e.g., the light source 1304); a first grating (e.g., the grating 1310)and a second grating (e.g., the grating 1308); a phase selector (e.g.,the piezo fringe shifter 1312); and at least one reflective component(e.g., the rotatable mirror 1302). In a first position (e.g., as firstlyexemplified) the reflective component forms a first light path from thelight source to the first grating (e.g., by the first end 1328 notinterrupting the light 1324B) and thereafter to the phase selector(e.g., by the second end 1330 blocking the light 1324C). In a secondposition (e.g., as secondly exemplified), the reflective component formsa second light path from the light source to the second grating (e.g.,by the first end 1328 blocking the light 1324B) and thereafter to thephase selector (e.g., by the second end 1330 not interrupting the light1324G).

The above examples also illustrate a system that includes a light source(e.g., the light source 1304); a first grating (e.g., the grating 1308)and a second grating (e.g., the grating 1310); a phase selector (e.g.,the piezo fringe shifter 1312); and at least one mirror (e.g., therotatable mirror 1302). Particularly, the mirror has a first position(e.g., as secondly exemplified) that interrupts (e.g., by the first end1328) a first path from the light source to the second grating, whilenot interrupting (e.g., by the second end 1330 not blocking the light1324G) a second path from the first grating to the phase selector. Themirror has a second position (e.g., as firstly exemplified) thatinterrupts (e.g., by the second end 1330) a third path from the secondgrating and directs second light (e.g., the light 1324D) toward thephase selector, while not interrupting the first path (e.g., by thefirst end 1328 not blocking the light 1324B).

Examples herein relate to using a reflective component and one or moregratings to provide structured light which can be used for SIM imaging.In some implementations, the mechanical motion can be significant (e.g.,by rotating a mirror or another reflective component). However,reasonable mechanical and motion tolerances can be provided. Forexample, less or no precision may be needed regarding the start or stoppositions of a reflective component (e.g., a mirror or a prism mirror);and stability and repeatability can be provided (e.g., with a rotatablemirror) by using precision bearings (e.g., in the suspension 1320), aprecision spindle (e.g., in the axle 318), and/or an accurate mirror(e.g., with the rotatable mirror 1302 having low runout and/or goodflatness). The stability and repeatability may be made independent ofparts that can wear out (e.g., guide ways and/or end stops).

The terms “substantially” and “about” used throughout this Specificationare used to describe and account for small fluctuations, such as due tovariations in processing. For example, they can refer to less than orequal to ±5%, such as less than or equal to ±2%, such as less than orequal to ±1%, such as less than or equal to ±0.5%, such as less than orequal to ±0.2%, such as less than or equal to ±0.1%, such as less thanor equal to ±0.05%. Also, when used herein, an indefinite article suchas “a” or “an” means “at least one.”

It should be appreciated that all combinations of the foregoing conceptsand additional concepts discussed in greater detail below (provided suchconcepts are not mutually inconsistent) are contemplated as being partof the inventive subject matter disclosed herein. In particular, allcombinations of claimed subject matter appearing at the end of thisdisclosure are contemplated as being part of the inventive subjectmatter disclosed herein.

A number of implementations have been described. Nevertheless, it willbe understood that various modifications may be made without departingfrom the spirit and scope of the specification.

In addition, the logic flows depicted in the figures do not require theparticular order shown, or sequential order, to achieve desirableresults. In addition, other processes may be provided, or processes maybe eliminated, from the described flows, and other components may beadded to, or removed from, the described systems. Accordingly, otherimplementations are within the scope of the following claims.

While certain features of the described implementations have beenillustrated as described herein, many modifications, substitutions,changes and equivalents will now occur to those skilled in the art. Itis, therefore, to be understood that appended claims are intended tocover all such modifications and changes as fall within the scope of theimplementations. It should be understood that they have been presentedby way of example only, not limitation, and various changes in form anddetails may be made. Any portion of the apparatus and/or methodsdescribed herein may be combined in any combination, except mutuallyexclusive combinations. The implementations described herein can includevarious combinations and/or sub-combinations of the functions,components and/or features of the different implementations described.

What is claimed is:
 1. A system comprising: a light source; a firstgrating; a second grating; a rotatable reflective component that isrotatable between a first position and a second position; and a phaseselector; wherein, when the rotatable reflective component is in thefirst position, the rotatable reflective component forms a first lightpath comprising the light source, the first grating, and the phaseselector, and wherein, when the rotatable reflective component is in thesecond position, the rotatable reflective component forms a second lightpath comprising the light source, the second grating, and the phaseselector.
 2. The system of claim 1, wherein the first grating comprisesa first substrate having a first periodic structure, and wherein thesecond grating comprises a second substrate having a second periodicstructure.
 3. The system of claim 2, wherein the first periodicstructure has a first grating orientation and the second periodicstructure has a second grating orientation, wherein the first gratingorientation is substantially perpendicular to the second gratingorientation.
 4. The system of claim 1, wherein the first gratingcomprises a first prism, and wherein the second grating comprises asecond prism.
 5. The system of claim 1, wherein the first grating ispositioned substantially perpendicular to the second grating.
 6. Thesystem of claim 1, wherein the rotatable reflective component comprisesa rotatable mirror.
 7. The system of claim 6, wherein the rotatablemirror is double sided.
 8. The system of claim 6, wherein the rotatablemirror reciprocates between the first position and the second position.9. The system of claim 1, wherein the rotatable reflective componentcomprises a rotatable prism.
 10. The system of claim 1, wherein thelight source comprises a fiber optic cable.
 11. The system of claim 1,wherein light from the light source comprises a laser beam of one ormore wavelengths.
 12. The system of claim 1 further comprising aprojection lens.
 13. The system of claim 1, wherein the phase selectorcomprises a piezo actuator.
 14. A system comprising: a light source; afirst grating; a second grating; a translatable reflective componentthat is translatable between a first position and a second position; anda phase selector; wherein, when the translatable reflective component isin the first position, the translatable reflective component forms afirst light path comprising the light source, the first grating, and thephase selector, and wherein, when the translatable reflective componentis in the second position, the translatable reflective component forms asecond light path comprising the light source, the second grating, andthe phase selector.
 15. The system of claim 14, wherein the firstgrating comprises a first substrate having a first periodic structure,and wherein the second grating comprises a second substrate having asecond periodic structure.
 16. The system of claim 15, wherein the firstperiodic structure has a first grating orientation and the secondperiodic structure has a second grating orientation, wherein the firstgrating orientation is substantially perpendicular to the second gratingorientation.
 17. The system of claim 14, wherein the translatablereflective component comprises a translatable mirror.
 18. The system ofclaim 17, wherein the translatable mirror is horizontally translatablerelative to the first grating.
 19. The system of claim 17, wherein thetranslatable mirror is vertically translatable relative to the firstgrating.
 20. A system comprising: a light source; a first gratingcomprising a first periodic structure and a first prism; a secondgrating comprising a second periodic structure and a second prism; arotatable mirror that is reciprocally rotatable between a first positionand a second position; and a phase selector; wherein, when the rotatablemirror is in the first position, the rotatable mirror forms a firstlight path comprising the light source, the first grating, and the phaseselector, and wherein, when the rotatable mirror is in the secondposition, the rotatable mirror forms a second light path comprising thelight source, the second grating, and the phase selector.